Доступ предоставлен для: Guest

ISSN Online: 2379-1748

ISBN Flash Drive: 978-1-56700-518-9

5th Thermal and Fluids Engineering Conference (TFEC)
April, 5-8, 2020, New Orleans, LA, USA

PERFORMANCE STUDY OF VALVELESS TRAVELINGWAVE PIEZOELECTRIC PUMP IN MICROCHANNELS

Get access (open in a new tab) pages 517-527
DOI: 10.1615/TFEC2020.nma.032042

Аннотация

A three dimensional piezoelectric coupled fluid structure interaction simulation have been done using COMSOL multiphysics software 5.3a for the performance study of a valveless traveling wave piezoelectric micropump (VTWP). A complete multiphysics computational domain with applied voltage as an input to the electrode patch to initiate and sustain the fluid motion has been benchmarked using data from Afrasiab et al.[1]. The benchmark model of the pump has a length of 5.2mm. The fluid channel is having a width of 200µm and depth of 300µm. The top surface is a silicon diaphragm having a thickness of 6µm with a PZT-5H thin film layer of thickness 2.5µm over it. The VTWP is actuated by nine similar square electrode patches arranged along the axial direction of the channel. The working fluid is water. The unipolar sinusoidal peak to peak voltage of 20V with a phase shift 120° produces a traveling wave in the channel flow direction. Arbitrary Lagrangian Eulerian Method (ALE) has been employed for the fluid-structure interface deformation. In order to improve the performance of such pumps, the current study looks at two alternative configurations, one having a nozzle/diffuser (N/D) configuration and the other with a corrugated pump chamber. With a non-dimensional performance parameter and a non-dimensional flow ratio, the pumps with straight, N/D and corrugated configurations are compared for similar non-dimensional back pressure conditions. The pump with corrugated channel configuration shows better performance for the same back pressure.